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发明名称
摘要
申请公布号
JP4675439(B2)
申请公布日期
2011.04.20
申请号
JP19990505764
申请日期
1998.06.26
申请人
发明人
分类号
H01L21/285;C23C16/02;C23C16/14;C23C16/34;C23C16/52;H01L21/28;H01L21/336;H01L21/768;H01L29/49
主分类号
H01L21/285
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