| 摘要 |
PURPOSE: An electromagnetic-chuck controlling device of a channel separation type is provided to clamp only workpiece to process by individually driving an electromagnetic chuck on a channel basis by selectively magnetizing a whole or a part of the electromagnetic chuck. CONSTITUTION: A current sensor(113) senses the input of a main power source from a main power source input unit and of a driving power souce of an electromagnetic-chuck driving unit of each channel. A control/input unit controls the magnetization and demagnetization intensities of the electromagnetic chuck on a channel basis. A main control unit(110) senses the driving of the electromagnetic chuck by input current through the current sensor. A pulse output unit(141) outputs a driving pulse to control the magnetization intensity of a selected electromagnetic chuck with an electromagnetic-chuck driving unit. A relay driving unit(131) selectively drives the magnetization or demagnetization of the electromagnetic chuck on a channel basis of the electromagnetic-chuck driving unit.
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