发明名称 Solid-state imaging apparatus and method for producing the same
摘要 A solid-state imaging apparatus includes a plurality of photosensitive cells, and a driving unit provided for driving the plurality of photosensitive cells. Each photosensitive cell includes a photodiode formed to be exposed on a surface of a semiconductor substrate for the purpose of accumulating signal charge obtained by subjecting incident light to photoelectric conversion, a transfer transistor for transferring signal charge accumulated by the photodiode, a floating diffusion layer for temporarily accumulating signal charge transferred by the transfer transistor, and an amplifier transistor for amplifying signal charge temporarily accumulated in the floating diffusion layer. A source/drain diffusion layer provided in the amplifier transistor is covered with a salicide layer, and the floating diffusion layer is formed to be exposed on a surface of the semiconductor substrate.
申请公布号 US7928485(B2) 申请公布日期 2011.04.19
申请号 US20080290076 申请日期 2008.10.27
申请人 PANASONIC CORPORATION 发明人 UCHIDA MIKIYA;MATSUNAGA YOSHIYUKI;INAGAKI MAKOTO
分类号 H01L31/062;H01L27/146;H01L31/10;H04N5/335;H04N5/357;H04N5/369;H04N5/374 主分类号 H01L31/062
代理机构 代理人
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