发明名称 Linear electron source, evaporator using linear electron source, and applications of electron sources
摘要 A method of charging a web or foil is described. The method includes guiding a web or foil having a thickness of 10 μm or larger with at least on roller; providing a linear electron source having a housing acting as an anode, the housing having side walls; a slit opening in the housing for trespassing of a linear electron beam, the slit opening defining a length direction of the source; a cathode being arranged within the housing and having a first side facing the slit opening; at least one gas supply for providing a gas into the housing; and a power supply for providing a high voltage between the anode and the cathode; and emitting the linear electron beam, wherein the high voltage is adjusted for providing an electron energy to implant electrons of the electron beam within the web or foil.
申请公布号 US7928411(B2) 申请公布日期 2011.04.19
申请号 US20080276872 申请日期 2008.11.24
申请人 APPLIED MATERIALS, INC. 发明人 KLEMM GUENTER;HACKER VOLKER;LOTZ HANS-GEORG
分类号 H01J49/08;H01J37/305 主分类号 H01J49/08
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