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发明名称	SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
摘要
申请公布号	KR101029691(B1)	申请公布日期	2011.04.15
申请号	KR20087016449	申请日期	2006.01.17
申请人		发明人
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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