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发明名称
VERFAHREN UND ANORDNUNG ZUR OPTISCHEN POSITIONSBESTIMMUNG EINES BEWEGBAREN SPIEGELS
摘要
申请公布号
AT504807(T)
申请公布日期
2011.04.15
申请号
AT20010903660T
申请日期
2001.01.18
申请人
HEIDELBERG INSTRUMENTS MIKROTECHNIK GMBH
发明人
VOGLER, SVEN;KAPLAN, ROLAND;WEIKERT, ROBERT;WIJNAENDTS-VAN-RESANDT, ROELOF
分类号
G01B11/00;G01D5/30;G01D5/26;G01D5/28;G01M11/00;G02B26/08;G02B26/10
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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