发明名称 |
TROCKEN-RÜCKÄTZEN VON VERBINDUNGSKONTAKTEN |
摘要 |
A method and structure for a composite stud contact interface with a decreased contact resistance and improved reliability. A selective dry etch is used which comprises a fluorine containing gas. The contact resistance is reduced by partially dry-etching back the tungsten contact after or during the M1 RIE process. The recessed contact is then subsequently metalized during the M1 liner/plating process. The tungsten contact height is reduced after it has been fully formed. |
申请公布号 |
AT504084(T) |
申请公布日期 |
2011.04.15 |
申请号 |
AT20060778036T |
申请日期 |
2006.07.27 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BREARLEY, WILLIAM;GRECO, STEPHEN;SANKARAN, SUJATHA;STANDAERT, THEODORUS |
分类号 |
H01L21/768;H01L23/522;H01L23/532 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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