| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for forming an organic film, in which the durability and smoothness of the organic film formed of a silane coupling agent can be improved by post-processing after the film is formed. <P>SOLUTION: The method for forming the organic film includes an organic film formation step for forming the organic film 110 by the silane coupling agent on a surface of a base material 100, and a post-processing step which includes a water vapor introduction step for holding the base material 100 with the organic film 110 formed thereon in an atmosphere that includes at least the water vapor, and a dehydration processing step for holding the base material in an atmosphere smaller in amount of the existing water vapor than in the atmosphere of the water vapor introduction step. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
