| 摘要 |
PROBLEM TO BE SOLVED: To provide an electromagnetic actuator that suppresses an influence on a thrust force due to residual magnetization, and ensuring positioning accuracy of a table. SOLUTION: The linear electromagnetic actuator 10 displaces a relative position between a slide table 46 supporting permanent magnets 16a, 16b and a guide rail 20 supporting a coil 12 disposed opposite to the permanent magnets 16a, 16b by the thrust force generated by supplying a current to the coil 12. The coil 12 is mounted onto the guide rail 20 through a low coercive-force magnetic material 36 with a lower coercive force than a predetermined level. Accordingly, generation of residual magnetization can be suppressed, resulting in the suppression of the influence on the thrust force due to the residual magnetization. COPYRIGHT: (C)2011,JPO&INPIT |
