| 摘要 |
PROBLEM TO BE SOLVED: To improve the precision of a bonding position between a glass substrate and a silicon substrate. SOLUTION: This manufacturing method is adapted to manufacture a liquid droplet ejection head that includes a glass substrate having an electrode section, a silicon substrate having a vibration section and a nozzle substrate having a nozzle section. The manufacturing method includes an absorption material adhesion step of adhering an absorption material for absorbing laser light on at least one face of the glass substrate and the silicon substrate, an alignment step of superposing the glass substrate on the silicon substrate with the absorption material therebetween and performing positioning for bonding, and a first bonding step of radiating the laser light toward the absorption material at a normal temperature so as to bond the glass substrate to the silicon substrate. COPYRIGHT: (C)2011,JPO&INPIT
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