CARBON NANOTUBE PRODUCTION PROCESS AND CARBON NANOTUBE PRODUCTION APPARATUS

摘要

A substrate 10 that selectively allows hydrogen to permeate therethrough is formed with a catalyst thin layer 20 on a first side 11 thereof and is heated in a furnace tube 110, which functions as a reactor, of a heating furnace 100 while a raw material gas to the catalyst thin layer 20 is fed. Hydrogen produced on the first side 11 of the substrate 10 as a result of the formation of carbon nanotubes 5 is separated from the raw material gas and is allowed to permeate to a second side 12 thereof.