发明名称 SEMICONDUCTOR DEVICE HAVING A COPPER PLUG
摘要 Disclosed is a semiconductor device wherein an insulation layer has a copper plug in contact with the last wiring layer of the device. There may also be a barrier layer separating the copper plug from the insulation layer. In a further embodiment, there may also be an aluminum layer between the insulation layer and copper plug. Also disclosed is a process for making the semiconductor device.
申请公布号 WO2011043869(A2) 申请公布日期 2011.04.14
申请号 WO2010US46268 申请日期 2010.08.23
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION;FAROOQ, MUKTA, G.;KINSER, EMILY, R.;MELVILLE, IAN, D.;SEMKOW, KRYSTYNA, W. 发明人 FAROOQ, MUKTA, G.;KINSER, EMILY, R.;MELVILLE, IAN, D.;SEMKOW, KRYSTYNA, W.
分类号 H01L21/60;H01L23/48;H01L23/52 主分类号 H01L21/60
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