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发明名称
Positive Resistzusammensetzungen und Strukturierungsverfahren
摘要
申请公布号
DE602009000788(D1)
申请公布日期
2011.04.14
申请号
DE20096000788T
申请日期
2009.01.16
申请人
SHIN-ETSU CHEMICAL CO. LTD.
发明人
OHSAWA, YOUICHI;KINSHO, TAKESHI;WATANABE, TAKERU
分类号
G03F7/004;G03F7/039;G03F7/20
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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