发明名称 METHOD FOR MAKING A MAGNETIC FLUID SEAL WITH PRECISE CONTROL OF FLUID VOLUME AT EACH SEAL STAGE
摘要 <p>A magnetic fluid seal includes a pole ring having an inner diameter, a rotatable shaft having an outer diameter, the rotatable shaft configured to extend along the inner diameter of the pole ring between an atmosphere side and vacuum side, at least one magnet coupled to the pole ring, the at least one magnet configured to emit a magnetic field having a strength and a shape, and grooves formed on either the inner diameter of the pole ring or the outer diameter of the shaft, the grooves capable of containing ferromagnetic fluid. The ferromagnetic fluid contained the grooves varies so as to improve the performance of the magnetic fluid seal.</p>
申请公布号 EP2203666(B1) 申请公布日期 2011.04.13
申请号 EP20080840056 申请日期 2008.10.16
申请人 RIGAKU INNOVATIVE TECHNOLOGIES INC. 发明人 MAHONEY, DAVID, G.;HELGELAND, WALTER
分类号 F16J15/43 主分类号 F16J15/43
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