发明名称 |
Optical component cleanliness and debris management in laser micromachining applications |
摘要 |
<p>Preferred embodiments of a purge gas port, laser beam attenuating input window, and laser shutter constitute subsystems of a UV laser optical system in which a laser beam is completely enclosed to reduce contamination of the optical system components. Purge gas is injected through multiple locations in a beam tube assembly to ensure that the optical component surfaces sensitive to contamination are in the flow path of the purge gas. The input window functions as a fixed level attenuator to limit photopolymerization of airborne molecules and particles. Periodically rotating optical elements asymmetrically in their holders reduces burn damage to the optics.</p> |
申请公布号 |
GB2446328(B) |
申请公布日期 |
2011.04.13 |
申请号 |
GB20080009120 |
申请日期 |
2006.11.30 |
申请人 |
ELECTRO SCIENTIFIC INDUSTRIES, INC |
发明人 |
BRYAN C BOLT;DAVID M HEMENWAY;MARK KOSMOWSKI;A GREY LERNER;BRADY E NILSEN;RICHARD POPE |
分类号 |
H01S3/10;B23K26/02 |
主分类号 |
H01S3/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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