SUSCEPTOR AND ATOMIC LAYER DEPOSITION APPARATUS HAVING THE SAME,申请号KR20080135375-传众专利搜索

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发明名称	SUSCEPTOR AND ATOMIC LAYER DEPOSITION APPARATUS HAVING THE SAME
摘要
申请公布号	KR101028410(B1)	申请公布日期	2011.04.13
申请号	KR20080135375	申请日期	2008.12.29
申请人		发明人
分类号	H01L21/205;C23C16/455	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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