发明名称 |
Micromechanical bulk acoustic mode resonators having interdigitated electrodes and multiple pairs of anchor supports |
摘要 |
A micromechanical resonator operable in a bulk acoustic mode includes a resonator apparatus suspended over a substrate by a plurality of pairs of anchors. The resonator apparatus includes a conductive metal layer, a piezoelectric layer on the conductive metal layer and a plurality of interdigitated electrodes on the piezoelectric layer. The interdigitated electrodes are configured so that a total number of electrode fingers in the plurality of interdigitated electrodes is greater than a total number of the plurality of pairs of anchors. |
申请公布号 |
US7924119(B1) |
申请公布日期 |
2011.04.12 |
申请号 |
US20100943319 |
申请日期 |
2010.11.10 |
申请人 |
GEORGIA TECH RESEARCH CORPORATION |
发明人 |
AYAZI FARROKH;HO GAVIN KAR-FAL;ABDOLVAND REZA |
分类号 |
H03H9/00;H03H9/17 |
主分类号 |
H03H9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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