发明名称 Resistive Memory Device and Manufacturing Method Thereof and Operating Method Thereof
摘要 A method of manufacturing resistive memory includes the steps: forming a first implanted stacked structure having a first impurity diffusion layer, a second impurity diffusion layer, and a third impurity diffusion layer in a substrate; etching at least the first implanted stacked structure to form a plurality of second implanted stacked structures, wherein the first impurity diffusion layers are first signal lines; forming a plurality of first insulating layers between the second implanted stacked structures; etching the second implanted stacked structures to form a plurality of third implanted stacked structures, wherein the first signal lines are not etched; forming a plurality of second insulating layers between the third implanted stacked structures; forming a plurality of memory material layers electrically coupled to the third impurity diffusion layers; and forming a plurality of second signal lines perpendicular to the first signal lines and electrically coupled to the memory material layers.
申请公布号 US2011080766(A1) 申请公布日期 2011.04.07
申请号 US20090574938 申请日期 2009.10.07
申请人 MACRONIX INTERNATIONAL CO., LTD. 发明人 CHANG KUO-PIN;LUE HANG-TING;TSAI CHENG-HUNG
分类号 H01L45/00;G11C11/00;H01L21/28 主分类号 H01L45/00
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