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发明名称
Method for forming the isolation layer
摘要
申请公布号
KR101026376(B1)
申请公布日期
2011.04.07
申请号
KR20040052028
申请日期
2004.07.05
申请人
发明人
分类号
H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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