| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for analysis of failure of a semiconductor device that reduces failure analysis time. SOLUTION: A semiconductor device as an analysis target is virtually partitioned into a plurality of planarly-arranged blocks. On the basis of layout data of the semiconductor device and virtual-partition data of the blocks, it is configured to calculate, for each block, a degree of certainty of the failure occurrence about each aggregate respectively comprising the same type of circuit components or the other type of circuit components in a plurality of the circuit components in each block. By this arrangement, a table is formed for each block so as to show a plurality of the degrees of certainty. A test for electrical characteristics is executed to the semiconductor device. When recognizing a failure, the block in which the recognized failure occurs is specified from among the plurality of blocks. A physical analysis for detecting a failure is executed to the circuit components, whose type is related to the degree of certainty, in the order of the higher degrees of certainty in the specified block while referring to the table. COPYRIGHT: (C)2011,JPO&INPIT
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