| 摘要 |
PROBLEM TO BE SOLVED: To provide a resist stripping agent showing excellent resist stripping property, suppressing corrosion of copper and molybdenum, and also suppressing galvanic corrosion. SOLUTION: The resist stripping agent comprises 2-(N,N-dimethyl-2-aminoethoxy)ethanol, urea and water, wherein the stripping agent shows excellent resist stripping property and can suppress corrosion of copper and molybdenum as well as galvanic corrosion between copper and molybdenum. The stripping agent preferably contains 2-(N,N-dimethyl-2-aminoethoxy)ethanol by 0.1 wt.% or more and 80 wt.% or less and urea by 0.1 wt.% or more and 30 wt.% or less. COPYRIGHT: (C)2011,JPO&INPIT |
