| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical member that can employ a layout of an optical path passing between the bottom surface of a mirror and a casing in optical path design by an exposing means and reduce vibration of the mirror. SOLUTION: The optical member includes the mirror for reflecting light emitted from a light source, two first supporting parts for supporting the mirror at positions separate in the longitudinal direction, and two second supporting parts for supporting the mirror at positions separate in the longitudinal direction. The length of the mirror is longer in the longitudinal direction than the length between the first supporting parts. The second supporting parts are arranged closer to the end than the first supporting parts in the longitudinal direction of the mirror. COPYRIGHT: (C)2011,JPO&INPIT
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