| 摘要 |
PROBLEM TO BE SOLVED: To highly accurately obtain a Moire pattern similar to a crystal lattice image in a short time. SOLUTION: A method for obtaining a crystal lattice Moire pattern of a crystal structure through the use of a scanning microscope includes the process for periodically arranging a plurality of virtual lattice points in a scanning surface of the crystal structure according to the crystal structure and orientation, the process for detecting signals from the plurality of virtual lattice points through the use of an incidence probe, and the process for generating a crystal lattice Moire pattern of the crystal structure on the basis of detected signals. COPYRIGHT: (C)2011,JPO&INPIT
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