SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PLACING TABLE,申请号KR20087015934-传众专利搜索

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发明名称	SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PLACING TABLE
摘要
申请公布号	KR101027845(B1)	申请公布日期	2011.04.07
申请号	KR20087015934	申请日期	2007.03.30
申请人		发明人
分类号	H01L21/3065;H01L21/205;H01L21/683	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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