发明名称 NONVOLATILE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a nonvolatile memory that improves characteristics by preventing power consumption; and to provide a method of manufacturing the same. <P>SOLUTION: The nonvolatile memory device includes a memory cell 80a that is connected to a first interconnection 10 and second interconnection 11. The memory cell 80a has a plurality of layers. The plurality of layers include: a resistance change film 24, which is a memory layer; and a carbon nanotube-containing layer 23 that contacts with the memory layer and contains a plurality of carbon nanotubes 23c, which in turn functions as an electrode of the resistance change film 24. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011071229(A) 申请公布日期 2011.04.07
申请号 JP20090219625 申请日期 2009.09.24
申请人 TOSHIBA CORP 发明人 FUKUMIZU HIROYUKI;NOJIRI YASUHIRO;NAKAI TSUKASA
分类号 H01L27/10;H01L21/8246;H01L27/105;H01L45/00;H01L49/00;H01L51/05;H01L51/30 主分类号 H01L27/10
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