发明名称 |
SIDE GAS INJECTOR FOR PLASMA REACTION CHAMBER |
摘要 |
A side gas injector for a plasma reaction chamber is provided. The side gas injector includes a circular distribution plate and a cover plate. The circular distribution plate includes an injection hole for injecting a reaction gas and a distribution channel part for distributing the reaction gas such that the reaction gas introduced from the injection hole can be radially simultaneously jetted in a plurality of positions along an inner circumference surface of the distribution plate. The cover plate is coupled to a top of the distribution plate and seals a top of the distribution channel part.
|
申请公布号 |
US2011079356(A1) |
申请公布日期 |
2011.04.07 |
申请号 |
US20100871109 |
申请日期 |
2010.08.30 |
申请人 |
KIM MINSHIK;KO SUNGYONG;CHAE HWANKOOK;PARK KUNJOO;KIM KEEHYUN;LEE WEONMOOK |
发明人 |
KIM MINSHIK;KO SUNGYONG;CHAE HWANKOOK;PARK KUNJOO;KIM KEEHYUN;LEE WEONMOOK |
分类号 |
C23F1/08 |
主分类号 |
C23F1/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|