| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce uneven scattering in a constitution in which an apparatus is separated from an object to be scattered with particles. <P>SOLUTION: The particle scattering apparatus (RSS) is equipped with a particle holder (2) which is arranged spacing out to the scattering object (B) scattered with particles (RSS1) and rotates holding the particles (RSS1), through holes (3) which penetrate a space between an opposed surface (2a) of the particle holder (2) opposed to the scattering object (B) and a surface (2b) of the reverse side to the opposed surface (2a), a first opening (3a) of the opposed surface (2a), a second opening (2b) of the surface (2b) of the reverse side to the opposed surface (2a), a particle filling member (11) which fills the particles (RSS1) in the through hole (3), and a particle scattering member (12) which is arranged on the second opening (3b) side at a scattering position (Q2), advances from the second opening (3b) into the through hole (3) and scatters pushing out the particles (RSS1) held in the through hole (3) from the first opening (3a) towards the scattering object (B). <P>COPYRIGHT: (C)2011,JPO&INPIT |
