CANTILEVER SENSOR

摘要

Disclosed is a cantilever sensor. In order to remove a parasitic resistance component and a parasitic capacitance component of a cantilever device, a cantilever sensor according to one embodiment of the present invention has a compensation unit connected, together with the cantilever device, to a differential amplifier. The compensation unit comprises: a resistor having the same resistance value as that of the parasitic resistance component of the cantilever device; and a capacitor having the same capacitance value as that of the parasitic capacitance component of the cantilever device. As the differential amplifier removes an in-phase component of the cantilever device and compensation unit, the parasitic resistance component and the parasitic capacitance component of the cantilever device are removed from an output of the differential amplifier, and thus, a resonant frequency can be accurately analyzed by means of the mechanical properties of the cantilever device. Here, the compensation unit has the same electrical properties as the cantilever device, and can use the inactive cantilever device that does not have mechanical properties.