发明名称 Piezoelectric or electrostrictive element and manufacturing method of the same
摘要 There is disclosed a piezoelectric/electrostrictive element which can be used as a sensor, even if a piezoelectric/electrostrictive layer cracks. Provided is a piezoelectric/electrostrictive element 10 comprising a substrate 11, a lower electrode layer 12 secured onto the substrate 11, and a piezoelectric/electrostrictive layer 13 secured onto the lower electrode layer 12, and the coverage of the lower electrode layer 12 with respect to the substrate 11 is 98% or less.
申请公布号 EP2214221(A3) 申请公布日期 2011.04.06
申请号 EP20100250106 申请日期 2010.01.22
申请人 NGK INSULATORS, LTD. 发明人 OHNISHI TAKAO;UMEDA YUHJI;GOTO NAOKI
分类号 H01L41/047;H01L41/09;H01L41/18;H01L41/187;H01L41/22;H01L41/29;H01L41/43 主分类号 H01L41/047
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