发明名称 PANEL SUPPLY SYSTEM OF PANEL INSPECTION SYSTEM
摘要 PURPOSE: A panel supply device of a panel inspection device is provided to install X and Y axis driving motors in a panel supply unit to put a weight center in the center of the panel supply device, thereby increasing durability of a tilting motor. CONSTITUTION: An X-axis clamp bar(100a,100b) is coupled with an X-axis driving belt(120,130) connected to an X-axis driving motor(110). A Y-axis clamp bar(200a,200b) is coupled with a Y-axis drive belt(220,230) connected to a Y-axis driving motor(210). A panel supply unit is tilted by a tilting motor(400). X and Y axis driving motors are installed in the panel supply unit to put a weight center in the center of the panel supply device so that durability of the tilting motor increases.
申请公布号 KR20110035226(A) 申请公布日期 2011.04.06
申请号 KR20090092852 申请日期 2009.09.30
申请人 LUKEN TECHNOLOGIES 发明人 AN, YUN TAE
分类号 H01L21/68;G02F1/13 主分类号 H01L21/68
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