NONVOLATILE MEMORY DEVICES AND METHOD FOR FABRICATING THE SAME
摘要
PURPOSE: A non-volatile memory device and manufacturing method thereof are provided to prevent charges in a charge storage film from being spread. CONSTITUTION: A stack structure includes vertically stacked conductive lines. The stack structure includes interlayer insulating film patterns(122,124) between the conductive lines. A semiconductor pattern(200) penetrates the stack structure and is connected to the semiconductor substrate. An information storage film(230) is formed between the semiconductor pattern and the conductive lines. A fixed charge layer(142) is arranged between the semiconductor pattern and the interlayer insulating film patterns.
申请公布号
KR20110035525(A)
申请公布日期
2011.04.06
申请号
KR20090093292
申请日期
2009.09.30
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
HUO ZONG LIANG;LEE, MYOUNG BUM;HWANG, KI HYUN;SHIN, SEUNG MOK;KIM, SUN JUNG