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经营范围
发明名称
Substrate processing apparatus
摘要
申请公布号
KR101027325(B1)
申请公布日期
2011.04.06
申请号
KR20080116945
申请日期
2008.11.24
申请人
发明人
分类号
H01L21/02;H01L21/48
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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