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经营范围
发明名称
MOCVD Apparatus
摘要
申请公布号
KR101026058(B1)
申请公布日期
2011.04.04
申请号
KR20080065107
申请日期
2008.07.04
申请人
发明人
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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