METHODE DE CARACTERISATION D'UN PROCEDE D'IMPLANTATION IONIQUE.,申请号FR20090050698-传众专利搜索

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发明名称	METHODE DE CARACTERISATION D'UN PROCEDE D'IMPLANTATION IONIQUE.
摘要
申请公布号	FR2941816(B1)	申请公布日期	2011.04.01
申请号	FR20090050698	申请日期	2009.02.05
申请人	COMMISSARIAT A L'ENERGIE ATOMIQUE	发明人	MILESI FREDERIC;MAZEN FREDERIC
分类号	H01L21/337;H01L21/66	主分类号	H01L21/337
代理机构		代理人
主权项
地址

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