| 摘要 |
<p>PURPOSE: A vacuum chamber cooling device is provided to improve production efficiency by simply removing heat in a vacuum chamber without vibration. CONSTITUTION: A heat pipe(110) connects the inside and the outside of a vacuum chamber(20). A refrigerant filled in the heat pipe is one of R-22, R-134a and R-407C. The heat transmitted to the heat pipe is removed by a condenser or a heat radiation plate for cooling. A cooling member(120) is connected to the heat pipe and removes the heat transmitted to the heat pipe and is driven with external power.</p> |
