发明名称 POLYUREA FILM AND METHOD FOR DEPOSITING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a polyurea film having more excellent chemical resistance, and to provide a method for depositing the same. <P>SOLUTION: A coating film is formed with polyurea obtained by polymerizing alicyclic polyamine and alicyclic polyisocyanate by a vapor deposition polymerization process. In the method for depositing a polyurea coating film, two kinds of raw material monomers A, B respectively poured into two evaporation sources 21A, 21B are heated and vaporized to obtain raw material gases, the raw material gases are mixed into a gaseous mixture, the gaseous mixture is introduced into a vacuum chamber 12, the two kinds of raw material monomers are vapor-deposited and polymerized at the surface of the body 13 to be treated, and a coating film made of a polyurea film is deposited on the surface of the body to be treated. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011063865(A) 申请公布日期 2011.03.31
申请号 JP20090217116 申请日期 2009.09.18
申请人 ULVAC JAPAN LTD 发明人 KANAI SHOTA;NAKAYAMA TAKAHIRO;IRIKURA HAGANE;OMORI DAISUKE;MOGI KAORI
分类号 C23C14/12;C08G18/32 主分类号 C23C14/12
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