| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a bonding technique which can bond two objects to be bonded with higher accuracy. <P>SOLUTION: Objects to be bonded 91 and 92 are relatively moved in a Z direction, and the object to be bonded 91 and the object to be bonded 92 is brought into contact with each other (step S13). A position gap ΔD of the objects to be bonded 91 and 92 in a horizontal direction is measured, in a state where the objects to be bonded 91 and 92 are made to come into contact with each other (step S14). Then, the objects to be bonded 91 and 92 are moved relatively in a horizontal direction, the alignment of the objects to be bonded 91 and 92 are carried out again, and the position gap ΔD is corrected (step S17). <P>COPYRIGHT: (C)2011,JPO&INPIT |
