发明名称 SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURE THEREOF
摘要 <P>PROBLEM TO BE SOLVED: To provide improved structures of a plurality of transistors and manufacturing processes thereof. <P>SOLUTION: A complimentary metal oxide semiconductor (CMOS) device 100 includes a PMOS transistor having at least two first gate electrodes each having a first parameter, and an NMOS transistor having at least two second gate electrodes each having a second parameter, wherein the second parameter is different from the first parameter. The first parameter and the second parameter may include the thickness or the dopant profile of the gate electrode materials 120 of the PMOS and NMOS transistors. The first and second parameters of the at least two first gate electrodes and the at least two second gate electrodes define the work function of the PMOS and NMOS transistors, respectively. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011066433(A) 申请公布日期 2011.03.31
申请号 JP20100242271 申请日期 2010.10.28
申请人 INFINEON TECHNOLOGIES AG 发明人 LUAN HONGFA;SCHULZ THOMAS
分类号 H01L21/8238;H01L21/8234;H01L27/08;H01L27/088;H01L27/092;H01L29/423;H01L29/49;H01L29/786 主分类号 H01L21/8238
代理机构 代理人
主权项
地址