| 摘要 |
A substrate characterization device is provided which includes an optical sensor module and a processor. The optical sensor module includes a light emitting source and a light receiving detector for communicating with the substrate and providing an indication of the diffusion of light through the substrate. The indication of the diffusion of light through the substrate is a signal provided to a processor in communication with a memory module for making a comparison of the signal generated by the optical sensor module with a reference signal to determine the quality of the substrate.
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