发明名称 SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a semiconductor device capable of preventing complication of a manufacturing process while suppressing a surge of a sense current, and to provide a method of manufacturing the same. <P>SOLUTION: A first semiconductor element part SX is provided with a first channel surface having a first plane direction and is used for switching a first current. A first region of a semiconductor layer is provided with a first trench having a first channel surface. A first gate insulating film covers the first channel surface at a first thickness. A second semiconductor element part SY is provided with a second channel surface having a second plane direction different from the first plane direction and is used for switching a second current smaller than the first current. A second region of the semiconductor layer is provided with a second trench having a second channel surface. A second gate insulating film covers the second channel surface at a second thickness larger than the first thickness. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011066121(A) 申请公布日期 2011.03.31
申请号 JP20090214375 申请日期 2009.09.16
申请人 MITSUBISHI ELECTRIC CORP 发明人 TAKANO KAZUTOYO
分类号 H01L29/78;H01L21/336;H01L27/04;H01L29/12;H01L29/739 主分类号 H01L29/78
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