发明名称 |
MICROVALVE FOR CONTROL OF COMPRESSED FLUIDS |
摘要 |
A micro-electromechanical device for controlling compressed fluid flow is provided. A chamber includes a fluid flow inlet port, a high pressure region exceeding 30 bar, and a fluid flow outlet port. A moveable micro-electromechanical valve is positioned to contact the fluid flow outlet port when the moveable micro-electromechanical valve is in a first position. An electrical connection to the moveable micro-electromechanical valve provides an electrical pulse train to the moveable micro-electromechanical valve to actuate the valve at a rate of 10 KHz or more to move the valve in order to control fluid communication between the high pressure region and a low pressure region downstream from the fluid flow outlet port.
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申请公布号 |
US2011073788(A1) |
申请公布日期 |
2011.03.31 |
申请号 |
US20090570312 |
申请日期 |
2009.09.30 |
申请人 |
MARCUS MICHAEL A;MEHTA RAJESH V;NG KAM C |
发明人 |
MARCUS MICHAEL A.;MEHTA RAJESH V.;NG KAM C. |
分类号 |
F16K31/12;F16K31/02 |
主分类号 |
F16K31/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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