发明名称 |
DROPLET-EJECTING HEAD, DROPLET-EJECTING APPARATUS, AND PIEZOELECTRIC ELEMENT |
摘要 |
A droplet-ejecting head including a substrate including a pressure chamber communicating with a nozzle hole and also a piezoelectric element that includes a lower electrode, a piezoelectric layer which is formed above the lower electrode, and an upper electrode formed above the piezoelectric element and that causes a change in pressure in a liquid contained in the pressure chamber. The piezoelectric layer includes a first piezoelectric sub-layer located on the lower electrode and a second piezoelectric sub-layer located between the first piezoelectric sub-layer and the upper electrode. The first piezoelectric sub-layer has a polarization axis predominantly directed in an in-plane direction of the first piezoelectric sub-layer. The second piezoelectric sub-layer is predominantly (100)-oriented in the pseudocubic coordinate system.
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申请公布号 |
US2011074890(A1) |
申请公布日期 |
2011.03.31 |
申请号 |
US20100891950 |
申请日期 |
2010.09.28 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
MIYAZAWA HIROMU;MOROZUMI KOICHI |
分类号 |
B41J2/045;H01L41/04 |
主分类号 |
B41J2/045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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