发明名称 Micromachined radio frequency circuit structures
摘要 A radio frequency circuit structure for transmitting radio signals includes a lower guide portion having a plurality of photocurable layers deposited on a substrate and an upper guide portion interfacing with the lower guide portion to define a guiding geometry. The upper guide portion may also include a plurality of photocurable layers deposited on a second substrate. A method for fabricating the radio frequency circuit structure includes depositing the plurality of photocurable layers on the substrate. A portion of each photocurable layer of the plurality of photocurable layers is exposed to ultraviolet light to form a latent image. The plurality of photocurable layers is developed to remove the portions not exposed to ultraviolet light to form a guide portion. The guide portion may be metalized and closed to form a guiding geometry. A lower guide portion may be closed by an upper guide portion formed in substantially the same manner as the lower guide portion.
申请公布号 US2011074528(A1) 申请公布日期 2011.03.31
申请号 US20090586962 申请日期 2009.09.30
申请人 ALCATEL-LUCENT USA INC. 发明人 PARDO FLAVIO;FULLOWAN ROBERT F.
分类号 H01P3/12;G03F7/20 主分类号 H01P3/12
代理机构 代理人
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