发明名称 |
FERROELECTRIC POLYMER MEMORY DEVICE INCLUDING POLYMER ELECTRODES AND METHOD OF FABRICATING SAME |
摘要 |
A method of fabricating a ferroelectric memory module with conducting polymer electrodes, and a ferroelectric memory module fabricated according to the method. The ferroelectric polymer memory module includes a first set of layers including: an ILD layer defining trenches therein; a first electrode layer disposed in the trenches; a first conductive polymer layer disposed on the first electrode layer; and a ferroelectric polymer layer disposed on the first conductive polymer layer. The module further includes a second set of layers including: an ILD layer defining trenches therein; a second conductive polymer layer disposed in the trenches of the ILD layer of the second set of layers; and a second electrode layer disposed on the second conductive polymer layer. The first conductive polymer layer and the second conductive polymer layer cover the electrode layers to provide a reaction and/or diffusion barrier between the electrode layers and the ferroelectric polymer layer.
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申请公布号 |
US2011073831(A1) |
申请公布日期 |
2011.03.31 |
申请号 |
US20100874124 |
申请日期 |
2010.09.01 |
申请人 |
ROCKFORD LEE D;ANDIDEH EBRAHIM |
发明人 |
ROCKFORD LEE D.;ANDIDEH EBRAHIM |
分类号 |
H01L45/00 |
主分类号 |
H01L45/00 |
代理机构 |
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代理人 |
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地址 |
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