发明名称 |
SURFACE-TREATED CERAMIC MEMBER, METHOD FOR PRODUCING SAME, AND VACUUM PROCESSING DEVICE |
摘要 |
<p>Disclosed is a surface-treated ceramic member which has a coating film-formed surface comprising a ceramic sintered body with a porosity of 1% or less and a sol-gel coating film of a silicon alkoxide compound polymer formed on at least a part of a ceramic sintered body, wherein the coating film and the surface of the body are coexistent in the coating film-formed surface. Specifically the area of the sol-gel coating film accounts for 5 to 80% of the total area of the coating film-formed surface. The surface-treated ceramic member has excellent corrosion resistance and is free from scattering of particles.</p> |
申请公布号 |
KR20110033860(A) |
申请公布日期 |
2011.03.31 |
申请号 |
KR20117003716 |
申请日期 |
2009.08.10 |
申请人 |
ULVAC, INC.;FERROTEC CERAMICS CORPORATION |
发明人 |
NAKANO KATSUAKI;ITOH JUNICHI;HIRAMATSU DAISUKE;ARAHORI TADAHISA;OKAMOTO KEN |
分类号 |
C04B41/84;C01B33/12;C23C18/02;H01L21/3065 |
主分类号 |
C04B41/84 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|