| 摘要 |
PURPOSE: A shaft drive unit and a substrate transfer apparatus including the same are provided to more efficiently transfer substrates by stably transmitting power of a power generating unit to a transfer shaft. CONSTITUTION: A shaft drive unit comprises an outer shaft(235) arranged outside a chamber, a magnetic member(230) formed in the chamber side end of the outer shaft, and a bearing which supports the outer shaft to revolve. The magnetic member comprises a magnetic gear which is formed to face the chamber and a pulley which is formed between the magnetic gear and the bearing.
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