INSPECTION APPARATUS FOR GLASS SUBSTRATE

摘要

PURPOSE: An inspection apparatus for glass substrates is provided to enable high-precision inspection in a split-type inspection apparatus by reducing the deformation and vibration during the splitting of the apparatus. CONSTITUTION: An inspection apparatus for glass substrates comprises an inspection stage(2), an optical mechanism(3), a driving part, and a foot part. The inspection stage loads a glass substrate being inspected. The optical mechanism irradiates an inspection light to the loaded glass substrate and receives the lights scattered from the surface or interior of the glass substrate. The driving part transfers one of the inspection stage and the optical mechanism. The foot part supports the installation of a base.