MANUFACTURING METHOD OF AN ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY

摘要

PURPOSE: A manufacturing method of an array substrate for a liquid crystal display is provided to integrally etch wirings without generating problems of a short, a wiring fault, and a reduction of brightness. CONSTITUTION: A method for manufacturing an array substrate of a liquid crystal display comprises steps of: forming a gate wiring in a top of a substrate; forming a gate insulating layer on the substrate including the gate wiring; forming a semiconductor layer on the gate insulating layer; forming a source and drain electrode on the semiconductor layer; and forming a pixel electrode connected to the drain electrode. The gate wiring is formed by forming a copper metal film of the substrate and etching the copper metal film using etchant composite. Etchant composite includes 0.1 ~ 25 weight% of hydrogen peroxide, 1 ~ 20 weight% of persulfate, and 0.1 ~ 5 weight% or soluble cyclic amine compound.