| 摘要 |
High magnetic moment films FeCo(X, Y), where X is a transition metal element and Y is a rare earth element are formed using off-axis static deposition techniques. The films have tunable magnetic anisotropy from 0 Oe to greater than 500 Oe that are thermally stable beyond nominal photoresist curing temperatures. By using off-axis static deposited FeCo(X, Y) films as seed layers to normally deposited FeCo films, inplane anisotropy and the magnetic moment can be controlled for specific design needs. Epitaxial-like growth (column-to-column matching) from the off-axis static FeCo(X,Y) seed layers to normally deposited FeCo films is attributed to sustained anisotropy in the entire film.
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