First detecting sheet and first thermometric system for detecting and measuring temperature of an object under test, second detecting sheet and second thermometric system for detecting and measuring temperature of a dummy substrate, and heat treatment apparatus using same

摘要

A first thermometry system for measuring a temperature of an object under test includes a first detecting sheet having crystal oscillators arranged on a first sheet-like object formed of resin, and a first measuring device for measuring the temperature based on frequencies acquired from the crystal oscillators and corresponding to natural frequencies of the crystal oscillators. In this system, the first detecting sheet is placed in contact with the object under test, whereupon the crystal oscillators provide the natural frequencies corresponding to the temperature of the object under test. The first measuring device measures the temperature of the object under test accurately based on the frequencies corresponding to the natural frequencies.